Fabrication of a New Air-Gap FBAR on an Organic Sacrificial Layer through an Innovative Design Algorithm

Realizing thin-film acoustic wave resonators presents many design and fabrication challenges. Actual material specifications always differ from nominal properties employed in simulations, as they depend on the deposition technique parameters used equipment type status. Moreover, each process introduces a degree of uncertainty regarding thicknesses layers. All these factors have substantial impact resonance frequency, which often differs designed value. This work details an aluminum nitride (AlN)-based thin-Film Bulk Acoustic Resonator (FBAR) showing one highest products Q-factor electromechanical coupling 6895. The is based innovative, fast, scalable approach that considers tolerances. algorithm returns very fast results order seconds, successfully estimates stack at 2.55 GHz with low error 0.005 (about 0.2%). FBAR layer suspended polymeric membrane innovative rapid dissolving sacrificial made Lift-Off Resist (LOR). new protocol obtains factor 4.7% maximum quality 1467, respectively.